真空阀门具备以下基本特点：首先，具有较高的气密封性，密封可靠。其次，对气流的阻力尽可能小，即阀门的流导要尽可能大。再者，密封部件耐磨性良好，能够反复使用，寿命较长。同时，阀体材料及密封件的放气量要小。此外，操作应灵活，便于清洗安装，性能可靠且维修方便。对于超高真空阀门而言，还要求能够耐高温烘烤，温度可达 450℃。而对节流阀来说，则要求能够均匀调节气体流量。

　　Vacuum valves have the following basic characteristics: firstly, they have high air tightness and reliable sealing. Secondly, the resistance to airflow should be minimized as much as possible, that is, the flow guidance of the valve should be maximized. Furthermore, the sealing components have good wear resistance, can be reused repeatedly, and have a long service life. At the same time, the air release of the valve body material and sealing components should be small. In addition, the operation should be flexible, easy to clean and install, reliable in performance, and easy to maintain. For ultra-high vacuum valves, it is also required to be able to withstand high temperature baking, with a temperature of up to 450 ℃. For throttle valves, it is required to be able to uniformly regulate the gas flow rate.

　　常用真空阀门阀体的材料主要有金属和玻璃。手动真空阀门驱动手轮采用高强度塑料材料，玻璃真空活塞又称“考克”，一般用于玻璃真空系统、小型真空装置、真空计规管或校准系统上。优点是制作比较容易、使用方便，易于清洗观察，化学稳定和绝缘性好，放气量较小等。　　不足之处是由于玻璃的脆性及活塞弯口处涂一层油脂，故限制了它的使用范围。工业生产所需要的真空装置，如真空镀膜设备、真空冶炼设备、真空热处理设备、空间环境模拟设备、火箭发动机模拟设备、卫星表面带电模拟设备、粒子加速器及受控核聚变装置、重离子加速器等都采用金属阀门。常用的真空阀门根据结构特点有：挡板阀、翻板阀、蝶阀、球阀、连杆阀、隔板阀、闸阀、双通阀、三通阀、四通直通阀和直通阀等几大类。其中，真空挡板阀和插板阀在真空系统中有着广泛的应用。01真空挡板阀01

　　The commonly used materials for vacuum valve bodies are mainly metal and glass. The manual vacuum valve drive handwheel is made of high-strength plastic material, and the glass vacuum piston, also known as "cock", is generally used in glass vacuum systems, small vacuum devices, vacuum gauge gauges or calibration systems. The advantages are that it is relatively easy to make, convenient to use, easy to clean and observe, chemically stable and insulated, and has a small amount of air release. The shortcomings are due to the brittleness of the glass and the application of a layer of grease at the piston bend, which limits its range of use. The vacuum devices required for industrial production, such as vacuum coating equipment, vacuum smelting equipment, vacuum heat treatment equipment, space environment simulation equipment, rocket engine simulation equipment, satellite surface electrification simulation equipment, particle accelerators and controlled nuclear fusion devices, heavy ion accelerators, etc., all use metal valves. The commonly used vacuum valves are divided into several categories based on their structural characteristics, including baffle valves, flap valves, butterfly valves, ball valves, connecting rod valves, diaphragm valves, gate valves, two-way valves, three-way valves, four-way through valves, and through valves. Among them, vacuum baffle valves and plug valves have a wide range of applications in vacuum systems. 01 Vacuum barrier valve 01

　　结构与工作原理

　　Structure and Working Principle

　　真空挡板阀的工作原理是阀板通过阀杆做上下运动而实现密封的。驱使阀杆运动的传动部件有手动、手电两动、气动三种方式。手动传动部件，以螺纹结构为主，也可以采用平凸轮结构。 ?当接通电源后，电动机按某一方向(如开启方向)旋转，通过蜗轮、蜗杆带动阀杆向上运动使阀板上升，当阀上升到一定高度时，行程开关自动切断电源，阀杆运动立即停止，反之亦然。手动时，松开手轮背帽，用手按一定方向转动手轮即可， ?气动传动部件以压缩干燥空气为动力，通过电磁换向阀改变气路方向，推动汽缸活塞上下运动，带动阀杆上下运动，使阀板开启关闭，从而达到接通或停止气流的目的。 ? ?图1 直角式真空挡板阀结构

　　The working principle of a vacuum damper valve is that the valve plate achieves sealing by moving up and down through the valve stem. There are three types of transmission components that drive the movement of the valve stem: manual, manual electric dual action, and pneumatic. Manual transmission components mainly use threaded structures, but can also adopt flat cam structures. When the power is turned on, the motor rotates in a certain direction (such as the opening direction), and the worm gear and worm drive the valve stem to move upward, causing the valve plate to rise. When the valve rises to a certain height, the travel switch automatically cuts off the power, and the valve stem movement immediately stops, and vice versa. When manual, release the back cap of the handwheel and rotate it in a certain direction with your hand. The pneumatic transmission component is powered by compressed dry air and changes the direction of the air path through an electromagnetic directional valve, pushing the cylinder piston up and down and driving the valve stem up and down to open and close the valve plate, thereby achieving the purpose of connecting or stopping the air flow. Figure 1 Structure of Right Angle Vacuum Baffle Valve

　　1—导向槽 ? 2—导向销 ? 3—阀杆 ? 4—阀盖5—密封阀 ? 6—阀体

　　1- Guide groove 2- Guide pin 3- Valve stem 4- Valve cover 5- Sealing valve 6- Valve body

　　真空挡板阀有高真空挡板阀和超高真空挡板阀两种。1.高真空挡板阀用于高真空系统接通或截止气流。适用压力范围：轴封为橡胶时为1.3×10-4～105Pa；轴封为波纹管结构时为1.3×10-5～105Pa。工作介质温度：-25～80℃（密封件为丁腈橡胶）；-30～150℃(密封件为氟橡胶)。

　　There are two types of vacuum baffle valves: high vacuum baffle valves and ultra-high vacuum baffle valves. 1. High vacuum baffle valves are used to connect or cut off airflow in high vacuum systems. Applicable pressure range: 1.3 × 10-4~105Pa when the shaft seal is rubber; 1.3 × 10-5~105Pa when the shaft seal is corrugated tube structure. Working medium temperature: -25~80 ℃ (seal made of nitrile rubber); -30-150 ℃ (seal made of fluororubber).

　　2.板阀用于超高真空系统接通或截止气流。适用压力范围为1.3×10-3～105Pa。阀门开启状态，烘烤温度小于400℃；阀体材料为不锈钢；阀板材料为无氧铜；轴封处密封件材料为不锈钢波纹管。这两种真空挡板阀使用的工作介质为洁净的空气或对阀门无腐蚀的干净气体。不适合用在对金属有强腐蚀性和含有颗粒状态灰尘的气体情况下长期使用。02真空插板阀01

　　2. Plate valves are used to connect or cut off airflow in ultra-high vacuum systems. The applicable pressure range is 1.3 × 10-3-105Pa. The valve is in the open state and the baking temperature is less than 400 ℃; The valve body material is stainless steel; The valve plate material is oxygen free copper; The sealing material at the shaft seal is stainless steel corrugated pipe. The working medium used for these two types of vacuum baffle valves is clean air or clean gas that is non corrosive to the valve. Not suitable for long-term use in gases that are highly corrosive to metals and contain particulate dust. 02 Vacuum plug valve 01

　　工作原理及使用范围

　　Working principle and scope of use

　　真空插板阀的工作原理是阀通过阀杆的左右或上下运动，将阀板与阀座压紧实现密封。驱动阀杆运动的方式有手动、电动、气动三种。手动是通过手轮的旋转，带动阀杆和阀杆上的螺母或四杆连动式的阀杆使阀板运动。 ?手、电两用的传动部件由直流电动机、齿轮箱组成。电动操作时，电动机按某一方向（如关闭方向）旋转，并通过传动部件使四杆连动式的阀杆往复运动。当阀板进入与阀座密封部位时，阀板靠板式弹簧部件的作用，使阀板压紧。 ?此时装有行程开关而自动切断电源，运动立即停止。反之，若需打开阀门时，只需按反转电钮即可。手动时，只需松开手轮背帽，按一定方向用手转动手轮即可。 ?图1为CCD-A型手、电两用的超高真空插板阀外形图。该阀结构合理，阀板与阀体密封时漏气速率小于1×10-7Pa·L/s；阀门总漏气速率小于5×10-8Pa·L/s；阀板开启时阀体烘烤温度小于150℃；手动装置允许受热温度小于65℃；工作稳定可靠，操作方便；可远距离控制。气动驱动部件以压缩干燥空气为动力，通过电磁换向阀使气动部件带动传动装置，使阀门往复运动实现启闭作用，达到密封的目的。 ? 图1 CCD-A型手、电两用超高真空插板阀外形图真空插板阀有高真空插板阀和超高真空插板阀两种。

　　The working principle of vacuum plug valve is that the valve is sealed by compressing the valve plate and valve seat through the left and right or up and down movement of the valve stem. There are three ways to drive the valve stem movement: manual, electric, and pneumatic. Manual operation is achieved by rotating the handwheel to drive the valve stem and the nut or four-bar linkage valve stem to move the valve plate. The transmission components that can be used for both manual and electrical purposes consist of a DC motor and a gearbox. When operated electrically, the motor rotates in a certain direction (such as the closing direction) and causes the four-bar linkage valve stem to reciprocate through transmission components. When the valve plate enters the sealing part with the valve seat, the valve plate is compressed by the action of the plate spring component. At this time, a travel switch is installed to automatically cut off the power supply, and the movement immediately stops. On the contrary, to open the valve, simply press the reverse button. When operating manually, simply loosen the back cap of the handwheel and turn it in a certain direction with your hand. Figure 1 shows the appearance of the CCD-A type ultra-high vacuum plug valve, which can be used for both manual and electrical purposes. The valve structure is reasonable, and the leakage rate when the valve plate and valve body are sealed is less than 1 × 10-7Pa · L/s; The total leakage rate of the valve is less than 5 × 10-8Pa · L/s; When the valve plate is opened, the baking temperature of the valve body is less than 150 ℃; The manual device allows the heating temperature to be less than 65 ℃; Stable and reliable work, easy to operate; Can be remotely controlled. The pneumatic drive component is powered by compressed dry air and drives the transmission device through an electromagnetic directional valve, causing the valve to reciprocate and achieve the purpose of sealing. Figure 1: Outline drawing of CCD-A type manual and electric dual-purpose ultra-high vacuum plug valve. There are two types of vacuum plug valves: high vacuum plug valve and ultra-high vacuum plug valve.  ?

　　1、高真空插板阀主要用于高真空系统中接通或截止气流。可安装在被抽真空容器（真空室）与真空泵之间；或用于在半连续真空作业的进出料容器上。使用温度为-20～80℃，不适用于对黑色金属有腐蚀性或含颗粒状物灰尘的气体。

　　1. High vacuum plug valves are mainly used to connect or cut off airflow in high vacuum systems. Can be installed between the evacuated container (vacuum chamber) and the vacuum pump; Or used on inlet and outlet containers for semi continuous vacuum operations. The operating temperature is -20~80 ℃, and it is not suitable for gases that are corrosive to black metals or contain particulate dust.

　　2、超高真空插板阀主要用于超高真空系统中接通或截止气流。适用的介质为洁净的空气或非腐蚀性气体；适用温度在阀门开启时，阀体允许烘烤温度小于150℃。 ?由于真空插板阀具有流导大，密封性能好，放气率低，体积小，结构紧凑、合理，操作方便，安装位置可任意选择等一系列优点，因此真空插板阀广泛用于中、大型高真空、超高真空装置的真空系统中。

　　2. Ultra high vacuum plug valves are mainly used to connect or cut off airflow in ultra-high vacuum systems. The applicable medium is clean air or non corrosive gas; When the valve is opened, the valve body is allowed to bake at a temperature less than 150 ℃. Due to its large flow conductivity, good sealing performance, low air release rate, small size, compact and reasonable structure, easy operation, and optional installation position, vacuum plug valves are widely used in vacuum systems of medium and large high vacuum and ultra-high vacuum devices.

　　02形式和性能参数

　　02 Form and Performance Parameters

　　1、高真空插板阀的形式与基本参数，已有行业标准（JB/T 4077—91）。该标准规范的高真空插板阀的形式和基本参数，适用于1.3×10-5～1.0×105Pa真空系统中用来开启或隔断气流的插板阀。开启阀门时，阀板两侧的压差应小于或等于2.7kPa。

　　1. The form and basic parameters of high vacuum plug valve have been standardized in the industry (JB/T 4077-91). The form and basic parameters of the high vacuum plug valve specified in this standard are applicable to plug valves used to open or block airflow in vacuum systems ranging from 1.3 × 10-5 to 1.0 × 105Pa. When opening the valve, the pressure difference on both sides of the valve plate should be less than or equal to 2.7kPa.

　　2、我国生产的超高真空插板阀有手动（CC型）、气动（CCQ型）和电动（CCD型）三种。适用于介质为清洁空气及非腐蚀性气体的超高真空系统中切断或接通气流。其中GC型系列高真空插板阀是以螺杆传动来推动钢球运动，撑开阀板关闭，又靠弹簧力收拢阀板打开的高真空阀门；GCQ系列以压缩空气为动力推动钢球运动，实现阀门的开启和关闭。这两种阀的材料为不锈钢，漏气速率不超过1.3×10-7Pa·L/s。GCD型系列阀门形式同CCD型超高真空插板阀，只是连接法兰按高真空法兰由刀口金属密封结构改为丁腈橡胶圈密封结构；阀体阀板材料可为不锈钢或碳钢镀镍，阀板密封件材料为丁腈橡胶。适用范围为1.3×104～105Pa。

　　2. There are three types of ultra-high vacuum plug valves produced in China: manual (CC type), pneumatic (CCQ type), and electric (CCD type). Suitable for cutting off or connecting airflow in ultra-high vacuum systems with clean air and non corrosive gases as the medium. The GC series high vacuum plug valve is a high vacuum valve that uses screw transmission to push the steel ball to move, opens and closes the valve plate, and then uses spring force to retract the valve plate and open it; The GCQ series is powered by compressed air to propel steel balls and achieve valve opening and closing. The material of these two valves is stainless steel, and the leakage rate does not exceed 1.3 × 10-7Pa · L/s. The GCD series valve has the same form as the CCD type ultra-high vacuum plug valve, except that the connecting flange has been changed from a knife edge metal sealing structure to a nitrile rubber ring sealing structure according to the high vacuum flange; The material of the valve body and valve plate can be stainless steel or nickel plated carbon steel, and the sealing material of the valve plate is nitrile rubber. The applicable range is 1.3 × 104~105Pa.

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